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Vdovin V.I.   Fedina L.I.   Гутаковский А.К.   Shek E.   Sobolev N.  

Formation of structural defects in Si wafers irradiated with low-energy electron beam

Reporter: Vdovin V.I.

Abstracts file: Вдовин_Кремний-2014(v2).doc


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