Румянцев Ю. Плеханов А. Файнер Н. Максимовский е. Шаяпов В. Юшина И.
Hydrogenated silicon oxycarbonitride films - promising materials for opto - and nanoelectronics
Reporter: Файнер Н.
| Abstracts file: | ФайнерНИ_тезисы _SiCxNyOz_H.doc |
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